Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology
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Providing a theoretical understanding of MEMS and NEMS, this book covers various aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, it discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal.
Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology